Founded in April, 2007
Established Shanghai Guanghan Vaccum Technology Co., Ltd. & Be SEMI member in 2009
Passed ISO9001 & ISO14001 in 2011。
Identified as Shanghai high-tech enterprises in 2012
Established Shanghai Sheen Microeletronics Equipment Technology Co.,Ltd. in 2013
Established Sichuan Vast Microeletronics Co.,Ltd. in 2013
Provide equipment total solution for semiconductor production line;
Services in 2,3,4,5,6,8-inch semiconductor production line
Specialize in Litho, Implant, Thin Film, Etch and Diff
4,000 ㎡refurbished area ，1000㎡ clean room
Ex-stock for litho、implant 、PVD etc.
A large stock of spare parts are available
46 professional engineers, over 70 staff
